Topography effects on high-NA EUV
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3054358
Authors: Nicole Guzman, Bojja Aditya Reddy, Mircea Dusa, Wim Bouman, Gurpreet Singh, Robert Seidel, Gijsbert Rispens, Alain Moussa, Matteo Beggiato, Christophe Beral, Viktor Kampitakis, Marta Anguera Antonana, Andre van Dijk, Florian Gstrein
Institutions: Intel (United States), IMEC, ASML (Netherlands)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409679236