Work

Effect of thermal process for biomass EUV/EB resist

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051170

Authors: Yuki Yoshikura, Harumi Sunaga, Kazuyo Morita

Institution: Oji Holdings (Japan)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Affordable and clean energy

Open Access status: closed

OpenAlex ID: W4409679245

FWCI:

Cites: 1

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Related to: 10