Non-ionic photo-acid generators for next-generation EUV photoresists
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3050818
Authors: Madan R. Biradar, Kyung Hee Oh, ChungHyeon Ban, Jae Hyun Kim, Rachel Snyder, Mingqi Li, Kenneth Hernandez, Huseyin Cem Kiliclar, Gokhan Sagdic, Christopher K. Ober
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409679259