Work

ResGNN-OPC: a fast optical proximity correction approach based on an interpretable residual graph neural network

Year: 2025

Type: article

Source: Applied Optics

DOI: 10.1364/ao.561432

Authors: Jingqing Liu, Xu Ma

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G3964752667

OpenAlex ID: W4409698193

FWCI: 0.451

Cites: 27

Cited by: 2

Related to: 10