Work

Toward extreme throughput nanotopography metrology with atomic force microscope arrays

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051135

Authors: Zhenle Cao, Qianshu Wang, Shawn Benedict, Alain Moussa, Janusz Bogdanowicz, David Morris

Institution: IMEC

Language: English

Topic: Force Microscopy Techniques and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409716686

FWCI: 14.16

Cites: 8

Cited by: 2

Related to: 10