Work

Hyperspectral alignment capability for direct writing systems enabled by structured illumination with a micro-LED array

Year: 2025

Type: article

Abstract: Direct writing systems equipped with a confocal micro-light-emitting diode array can employ active illumination for alignment purposes. Based on the principles of single-pixel imaging, structured illumination can be used to obtain position information via compressive sensing. The positions of markers with certain spectral signatures can be extracted from the recorded hyperspectral data through spectral filtering, spectral fitting, or principal component analysis. Its application to direct writing is demonstrated by creating individual photolithography patterns aligned with different types of fluorophores on the same substrate.

Source: Journal of Optics

DOI: 10.1088/2040-8986/adcfb0

Authors: A Blanchard, P R Edwards, B Guilhabert, E Gu, I M Watson, J Herrnsdorf

Institution: University of Strathclyde

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $3,325

Funder: Engineering and Physical Sciences Research Council