On-product, on-device overlay breakdown by layer and contributor using a high-voltage scanning electron microscope
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051095
Authors: Stefan Eyring, Deepak Selvanathan, Amrita Basu, Sunshine Zhou, Christian Holl, Boris Habets, Marc Filzen, Thomas Groos
Institution: Intel (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409759248