Work

Contribution of optical overlay target design to non-zero offset stability

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3060359

Authors: Apratim Dhar, Alexander Fisher, Carey Phelps, Richard Schuster, Jordan Pio, Nimrod Shuall, Scott Beatty, Yatir Linden, Anna Golotsvan, Nadav Gutman

Institutions: Intel (United States), KLA (United States), KLA (Israel)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409759249

FWCI:

Cites: 6

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Related to: 10