Work

Using programmed defect vehicle to understand printability of defect/2D structures and characterize it through EUV process impact

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3052510

Authors: Bojja Aditya Reddy, Balakumar Baskaran, Mohamed Saib, Joern-Holger Franke, Christophe Beral, Murat Pak, Sandip Halder, Mircea Dusa

Institution: IMEC

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4409759250

FWCI:

Cites: 6

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Related to: 10