Self-calibration overlay on ribbon-FET SRAM-like targets using full Mueller broadband spectroscopic ellipsometry for advanced process control
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3054799
Authors: William T. Blanton, Lavanya Parthasarathy, Travis Wright, Wenmei Ming, Kenneth O'Neal, Peter Paquet, Usman Majeed, Taher Kagalwala, Sharon Aharon, Amnon Manassen, Jordan Pio, Sury Ganesan, Derrick Shaughnessy
Institutions: Intel (United States), KLA (United States), KLA (Israel)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409759255