Work

Small angle x-ray scattering industrial overlay metrology solutions for 7nm nodes and beyond

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051328

Authors: Timothée Choisnet, Yoann Blancquaert, Freychet Guillaume, Jorge Nacenta Mendevil, Aurélien Sarrazin, Nischal Dhungana, Gergaud Patrice

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409759256

FWCI:

Cites: 32

Cited by:

Related to: 10