The deep learning technology for predicting memory hole contact distortion profile with multiple in-line data in 3D NAND flash memory
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051179
Authors: Hoyun Jung, Byung Yong Choi, Jongik Hong, Jonghyun Kim, Minsun Ryu, Seungyoon Kim, Seongwook Choi, Youngchan Park, Minkyu Jeong, Kyungyoon Noh, Bong-Tae Park, Seungwan Hong, Sung Hoi Hur
Institution: Samsung Electronics (South Korea)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409759262