Via to line-end contact failures: the role of stochastics
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3050970
Authors: Balakumar Baskaran, Dorin Cerbu, Matteo , Beggiato, Victor Blanco, Gian F. Lorusso, Danilo De Simone, Michael E. Adel, Christopher A. Mack
Institution: IMEC
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409759266