High-speed e-beam metrology using a pattern recognition-based image enhancement method
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3053873
Authors: Jun Chen, Kazushiro Takasugi, Haowen Hu, Hideaki Sasazawa, Yasutaka Toyoda, San Kang, Juyoung Im, Soohoon Kim, Jong-Hoi Cho, Ilyong Lee, Hyewon Park, Jong-Hyun Seo
Institutions: Hitachi High-Tech (Japan), SK Hynix (South Korea)
Language: English
Topic: Image Enhancement Techniques
Subfield: Computer Vision and Pattern Recognition
Field: Computer Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409759274