Work

LER distribution measurement using HHCF-based noise correction

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051341

Authors: Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409759281

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Cites: 13

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Related to: 10