Work

Optimized EUV scatterometry measurements with tunable high harmonic generation and the Fisher information matrix

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051113

Authors: Clay Klein, Nicholas W. Jenkins, Yunzhe Shao, Yunhao Li, Seungbeom Park, Wookrae Kim, Henry C. Kapteyn, Margaret M. Murnane

Institutions: National Institute of Standards and Technology, Samsung Electronics (South Korea), Kapteyn Murnane Laboratories

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409759282

FWCI: 2.358

Cites: 7

Cited by: 1

Related to: 10