A grid mapping-based U-net algorithm for photolithography overlay virtual metrology
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051382
Authors: Wonhui Park, Jae-Han Lee, Sang-Gil Park, Pil Sung Jo, Wonsang Chang, Junhak Lee, Mooyeob Lee, Gunwoong Cho, Il Koo Kim
Institution: SK Hynix (South Korea)
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409759283