Cherry-picking: automated model term selection for precise overlay and CD process control
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051064
Authors: Christoph Ehrlich, Philip Groeger, Ulrich Denker, Sven Boese, Sungwoo Jung
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409759284