Work

Zernike-based photolithography track modules matching for wafer CDU

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051932

Authors: Amit Ohri, Ted L. Taylor, Vlad Temchenko, Ranjan Khurana, Chris Kingsley, Gou Kawaguchi

Institution: Micron (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409759285

FWCI: 2.358

Cites: 4

Cited by: 1

Related to: 10