Work

Ellipsometry in the EUV regime

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3053165

Authors: Aaron Chew, Bryan M. Barnes, Eric L. Shirley, Thomas A. Germer

Institution: National Institute of Standards and Technology

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409759307

FWCI: 2.809

Cites: 20

Cited by: 1

Related to: 10