Work

Enhancing critical dimension measurement with nanometer scale using CNNs and optical theory-derived 3D point spread function

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051689

Authors: Ming-Jie Liu, Yu-Tang Huang, Liang-Chia Chen

Institution: National Taiwan University

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409759309

FWCI:

Cites: 15

Cited by:

Related to: 10