Enhancing overlay metrology accuracy via E-beam simulation and SEM target optimization
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051701
Authors: Hyunjae Kang, Haram Ko, Hyunju Song, Sungbin Jeon, Jinhong Park, Jong-Hwa Baek, Chang Min Park, You Jin Kim, Kevin Houchens, Jenny Perry, Nahum Bomshtein, Laxmi Narayan Patel, Noam Oved, Uri Smolyan, Michael Shifrin, Tal Itzkovich, Jeong Ho Yeo, Young Je Um, Troy Cha, Baek Jun Kim
Institutions: Samsung Electronics (South Korea), Applied Materials (Israel)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409759314