Work

E-beam metrology for high-NA: revisiting the imec protocol

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3052366

Authors: Gian F. Lorusso, Alain Moussa, Sahel Habashieh, Dieter Van Den Heuvel, Diziana Vangoidsenhoven, Mihir Gupta, Hyo Seon Suh, Ying-Lin Chen, Danilo De Simone, Chris Mack, Wei Sun, Masaki Sugie, Philippe Foubert, Miki Isawa, Anne-Laure Charley

Institutions: IMEC, Hitachi High-Tech (Japan)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409759315

FWCI: 2.293

Cites: 9

Cited by: 1

Related to: 10