Emerging x-ray metrology techniques with evolving front-end-of-line high-technology IC nodes
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051692
Authors: Gaurav Pandey, Wei-En Fu, Chun-Yu Liu, Chao-Ching Ho, Liang-Chia Chen
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409759318