Nondestructive in-cell conductivity metrology for memory semiconductors using near-field THz spectroscopy
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3050684
Authors: Sunhong Jun, Inkeun Baek, Hyunsoo Kwak, Hyeong Seok Yun, Yoonkyung Jang, Seonmyeong Kim, Hanjung Ryu, Wontae Kim, Martin Priwisch, Sooyeong Lee, Souk Kim, Junwoo Ahn, Taeyong Jo, Sungyoon Ryu, Myungjun Lee, Yusin Yang, Younghoon Sohn
Institution: Samsung Electronics (South Korea)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409759322