Leveraging AI and ML to transform Twinscan into an inline macro defect inspection system
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3050694
Institution: STMicroelectronics (France)
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409759327
