Accurate Analytical Modeling of 3-D Capacitor Based on Coaxial TSV Array and RDL
Year: 2025
Type: article
Institution: Xidian University
Language: English
Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G1981401797, G2320218852, G8921095769
OpenAlex ID: W4409762843
