GenAI applications of vision-language models for semiconductor defect classification
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3064772
Authors: Ting-Hung (Tim) Lin, Hung-Jen Chen, Yuan-Chung Wei, Sung-Po Yang, Yung-Lun Lin, Parthasarathy Sriram, Guan-Hong Liou, Yu-Chieh Huang, Yi-Hsuan Chiu, Po-Chun Lai, Yiyi Wang, Mark Peng
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409787802