Work

High-precision tip-based nanofabrication and nanometrology in extended macroscopic working areas

Year: 2025

Type: conference-paper

Source: SPIE Novel Patterning Technologies

DOI: 10.1117/12.3050479

Author: Jaqueline Stauffenberg

Institution: Technische Universität Ilmenau

Language: English

Topic: Force Microscopy Techniques and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409794802

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