Work

Multimodal Anomaly Detection for Semiconductor Manufacturing Material Quality

Year: 2025

Type: article

Source: Journal of Korean Institute of Industrial Engineers

DOI: 10.7232/jkiie.2025.51.2.182

Authors: Minji Baek, Seoung Bum Kim

Language: English

Topic: Fault Detection and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4409856413

FWCI:

Cites: 26

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Related to: 10