Work

Rapid 3D reconstruction of photomasks based on differential structured illumination microscopy

Year: 2025

Type: conference-abstract

Source: International Conference on Telecommunications, Optics, and Computer Science (TOCS)

DOI: 10.1117/12.3067727

Authors: Yafei Zhou, Shizhuo Wang, Lixin Zhao, Yan Tang, Zhongye Xie, Fujie Wang

Institutions: Dongguan University of Technology, Institute of Optics and Electronics, Chinese Academy of Sciences

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409874762

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