Work

Research on sensitivity simulation and optimization of SOI pressure-sensitive chip

Year: 2025

Type: article

Source: Sensor Review

DOI: 10.1108/sr-12-2024-0996

Authors: Zhong Jin, Feng He, Meng Zhou, Jinyu Li, Fang-Ting Liu, Junhui Li

Institutions: Central South University, China Electronics Technology Group Corporation, University of Science and Technology Beijing

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409981103

FWCI:

Cites: 14

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Related to: 10