Work

Development of an inspection method for electrical leakage tailored to target defect

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051259

Authors: Sangyeon Youn, Kwangil Shin, Gwang-Hyeon Nam, Wonjo Woo, Kwanhee Yoon, Seunghyun Shin, Jiwon Oh, Jongchul Kim, Yongdeok Jeong, Younghoon Sohn, Hyung Keun Yoo

Institution: Samsung Electronics (South Korea)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4410085771

FWCI:

Cites: 11

Cited by:

Related to: 10