Work

An AlN-Based Piezoelectric Ultrasonic Transducer Structure With Low Residual Stress

Year: 2025

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2025.3564988

Authors: Chunsheng Wu, Ziyue Guan, Ningyuan Hu, Xiaoya Duan, Danfeng Cui, Yonghua Wang, Yi Chen, Chenyang Xue

Institution: North University of China

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G5234184350, G5454427789

OpenAlex ID: W4410086442

FWCI: 0.907

Cites: 43

Cited by: 4

Related to: 10