Simulation of capacitively coupled Ar/O 2 discharges based on global/equivalent circuit model and an extended reaction set
Year: 2025
Type: article
Source: Chinese Physics B
Authors: Yi 怡 Wang 王, Wan 婉 Dong 董, Yi-Fan 逸凡 Zhang 张, Liu-Qin 柳琴 Song 宋, Yuan-Hong 远红 Song 宋
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4410109748