Work

Wafer-Scale Integration of Metal Oxide Nanocrystals on Gas Sensor Chips via Direct Lithographic Patterning

Year: 2025

Type: article

Source: ACS Sensors

DOI: 10.1021/acssensors.4c03663

Authors: Zhenyuan Tang, Fu Li, Miao Peng, Wenke Fu, Xia Liu, Jingyuan Zhang, Guanghai Fei, Min Tu

Institutions: Chinese Academy of Sciences, State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, University of Chinese Academy of Sciences, Beijing Institute of Technology, Ministry of Industry and Information Technology, Zhongda Hospital Southeast University, Southeast University

Language: English

Topic: Gas Sensing Nanomaterials and Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G355398962, G3670478219, G7541247763

OpenAlex ID: W4410138333

FWCI: 1.847

Cites: 60

Cited by: 8

Related to: 10