Work

Simultaneous multi-point glass processing using diffractive optical element and KrF excimer laser

Year: 2025

Type: conference-paper

Source: SPIE Novel Patterning Technologies

DOI: 10.1117/12.3051518

Authors: Akira Suwa, Tomonari Tanaka, Yasuhiro Adachi, Yasufumi Kawasuji

Institution: Gigaphoton Inc (Japan)

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410217760

FWCI:

Cites: 4

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Related to: 10