Work

High-Resolution X-Ray Imaging of Controlled Microcrack Steering in BEoL Stacks (Invited)

Year: 2025

Type: conference-paper

Source: IEEE International Reliability Physics Symposium proceedings

DOI: 10.1109/irps48204.2025.10983863

Authors: Ehrenfried Zschech, Kristina Kutukova

Institution: Brandenburg University of Technology Cottbus-Senftenberg

Language: English

Topic: 3D IC and TSV technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4410395247

FWCI:

Cites: 31

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Related to: 10