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Thermally Stable, BEOL-Configured MEMS-Based One-Time Programmable (OTP) Memory for Cryogenic Embedded Application

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3563940

Authors: Khanjan Miteshkumar Joshi, Manu Garg, Nitish Kumar, Yi Chiu, Pushpapraj Singh

Institutions: Indian Institute of Technology Delhi, National Yang Ming Chiao Tung University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science and Technology Council

Award: G5293211909

OpenAlex ID: W4410427437

FWCI:

Cites: 17

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Related to: 10