Work

Machine-Learning Algorithm Models for Extracting the Inherent Resonance Frequency and Quality Factor of MEMS Resonators Under the Feed-Through Effect

Year: 2025

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2025.3569169

Authors: Junming Zhang, Hengmao Liang

Institution: South China Agricultural University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Changsha Science and Technology Project

Awards: G127641583, G8643815405, G8882184845

OpenAlex ID: W4410427439

FWCI: 0.693

Cites: 23

Cited by: 3

Related to: 10