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A Novel Rolling-Window and Production-Maintenance-Based Machine Learning Approach to Virtual Metrology in Semiconductor Manufacturing

Year: 2025

Type: article

Source: IEEE Transactions on Automation Science and Engineering

DOI: 10.1109/tase.2025.3570863

Authors: Shu-Kai S. Fan, An-Ting Zheng

Institution: National Taipei University of Technology

Language: English

Topic: Fault Detection and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funder: National Science and Technology Council

Award: G735231121

OpenAlex ID: W4410427591

FWCI: 0.383

Cites: 35

Cited by: 1

Related to: 10