Work

Development of a MEMS Thermal Flow Sensor With High Reliability and Universality for Various Gases

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3564169

Authors: Wei Tian, Yuzhe Lin, Lianggong Wen, Maosen Xu, Jinghua Lin, Guoqing Hu, Jifang Tao

Institutions: Shandong University, Beihang University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Key Research and Development Program of China

Awards: G5745625381, G6353628195

OpenAlex ID: W4410427830

FWCI: 0.924

Cites: 31

Cited by: 4

Related to: 10