Asymmetric radio-frequency capacitively coupled plasma discharges: revisit for better understanding via kinetic simulation and statistical analysis
Year: 2025
Type: article
Source: Physica Scripta
Authors: Sarah Salah, Nagat Elkahwagy, Abdelhamid Elshaer, Mohammed Shihab
Institutions: Kafrelsheikh University, Tanta University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4410530282