Work

Substrate Loss Mechanism and Performance Enhancement via HR-Si of BAW Devices

Year: 2025

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2025.3565489

Authors: Guowei Zhi, Kaibin Xu, YiNuo Zhang, Yuhan Zhu, Tianyou Luo, Guilong Tao, Zhipeng Chen, Jiaqi Wang, Xinyan Yi, Guoqiang Li

Institutions: State Key Laboratory of Luminescent Materials and Devices, South China University of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Key Research and Development Program of China, Dalian Science and Technology Innovation Fund

Awards: G4934913847, G6091591738

OpenAlex ID: W4410536406

FWCI: 0.723

Cites: 31

Cited by: 3

Related to: 10