Work

A Koopman-Based Digital Twin Approach for Fault Detection in Cable Slab Dynamics of Wafer Scanners

Year: 2025

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2025.3569838

Authors: Michael Pumphrey, Mohammad Al Saaideh, Yazan M. Al-Rawashdeh, Natheer Alatawneh, Khaled F. Aljanaideh, Almuatazbellah M. Boker, Mohammad Al Janaideh

Institutions: University of Guelph, Memorial University of Newfoundland, Al-Zaytoonah University of Jordan, Jordan University of Science and Technology, Virginia Tech

Language: English

Topic: Fault Detection and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Natural Sciences and Engineering Research Council of Canada

OpenAlex ID: W4410536518

FWCI: 0.76

Cites: 25

Cited by: 2

Related to: 10