Work

Mapping of Lapping-Induced Subsurface Damage in Planar Fused Silica Glass Based on Polarized Laser Scattering Method

Year: 2025

Type: article

Abstract: Fused silica glass is a critical material in many industries due to its superior physicochemical properties. The detection of subsurface damage (SSD) poses fundamental challenges that directly affect the performance of fused silica glass. The polarized laser scattering (PLS) detection method has significant advantages in SSD detection, but damage mapping has not yet been achieved. This paper proposes an SSD mapping method based on the PLS detection results. The relationship between the PLS detection signals and the SSD depths of fused silica glass is established, and an SSD mapping diagram is successfully generated. Unlike existing studies that only provide local quantitative SSD depth, SSD mapping achieves simultaneous visualization of SSD location, depth, and uniformity of SSD distribution across the entire region, which provides guidance to determine the lapping or polishing parameters in the subsequent processes.

Source: Materials

DOI: 10.3390/ma18112417

Authors: Mingchuan Gao, Yi Guo, Chenxi Liu, Chuanxin He, Qian Bai

Institution: Dalian University of Technology

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $3,137

Funder: National Key Research and Development Program of China