Work

Nano-g resolution optical fiber MEMS accelerometer with symmetric push-pull spring structure

Year: 2025

Type: conference-paper

Source: International Conference on Optical Fiber Sensors (OFS)

DOI: 10.1117/12.3061068

Authors: Zexi Liu, Kan Gao, Jiajing He, Haoyang Pi, Yanguang Sun, Qing Ye, Haiwen Cai

Institutions: Chinese Academy of Sciences, Shanghai Institute of Optics and Fine Mechanics, University of Chinese Academy of Sciences, Shanghai Zhangjiang Laboratory, Zhangjiang Laboratory

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410611625

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