Work

Local Rational Modeling for Identification Beyond the Nyquist Frequency: Applied to a Prototype Wafer Stage

Year: 2025

Type: article

Abstract: Fast-rate models are essential for control design, specifically to address intersample behavior. The aim of this article is to develop a frequency-domain nonparametric identification technique to estimate fast-rate models of systems that have relevant dynamics and allow for actuation above the Nyquist frequency of a slow-rate output. Examples of such systems include vision-in-the-loop systems. Through local rational models over multiple frequency bands, aliased components are effectively disentangled, particularly for lightly damped systems. The developed technique accurately determines nonparametric fast-rate models of systems with slow-rate outputs, all within a single identification experiment. Finally, the effectiveness of the technique is demonstrated through experiments conducted on a prototype wafer stage used for semiconductor manufacturing.

Source: IEEE Transactions on Control Systems Technology

DOI: 10.1109/tcst.2025.3568550

Authors: Max van Haren, Lennart Blanken, Koen Classens, Tom Oomen

Institution: Eindhoven University of Technology

Language: English

Topic: Control Systems and Identification

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: European Commission, Nederlandse Organisatie voor Wetenschappelijk Onderzoek, Electronic Components and Systems for European Leadership, European Metrology Programme for Innovation and Research

Awards: G1890253336, G2960126438, Intelligent Motion Control under Industry 4.E, G5447453677, G5966765034