Work

Multiphysics Modeling of a Novel MEMS Accelerometer Based on Electromagnetic Induction

Year: 2025

Type: conference-paper

Abstract: This work reports on the development of a micromachined monolithic single-axis electromagnetic accelerometer based on the relative motion between the windings of a concentric planar transformer, whose internal inductor is suspended. The mechanical and electromagnetic modelling of the sensor is presented, as well as the implementation of a virtual read-out circuit. Electromagnetic simulations were used to extract the electrical performance parameters in the form of a lumped-element model. The results demonstrate that rotation between the two windings leads to an approximately linear variation in the mutual inductance. Furthermore, measurement circuit simulations revealed that the sensor could achieve an in-plane acceleration sensitivity of 32.9 mV/g for a matched network when excited with 3Vpp, 100 MHz excitation voltage.

Source: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

DOI: 10.1109/eurosime65125.2025.11006620

Authors: Ozberk Ozturk, Fares Tounsi, Laurent Francis, Denis Flandre, Murat Kaya Yapici

Institutions: Sabancı Üniversitesi, UCLouvain

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funder: Türkiye Bilimsel ve Teknolojik Araştırma Kurumu

Award: G1203333751