Work

Physics-Based Compact Modeling of an Ultrasonic Modulation MEMS Speaker Concept

Year: 2025

Type: conference-paper

Source: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

DOI: 10.1109/eurosime65125.2025.11006558

Authors: Christian Görner Tenorio, Andreas Bogner, Christian Bretthauer, Heinrich Heiss, Gabriele Schrag

Institutions: Infineon Technologies (Germany), Technical University of Munich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410639445

FWCI: 2.277

Cites: 15

Cited by: 1

Related to: 10